The UVic NanoFab is an open access user facility equipped with an Electron Beam Lithography (EBL) system in class 100 and 1000 clean rooms, and provides the capability of designing and fabricating nano-scale structures with feature sizes as small as 50 nm. The UVic NanoFab provides the researchers on campus with a broad range of nanofabrication capabilities to support electronics, optical, molecular, magnetics and MEMS (Micro-Electro-Mechanical Systems) projects. The NanoFab will also provide high quality personnel (HQP) training for graduate and undergraduate students, which will allow them to gain mind-expanding experiences with state-of-the-art nanotechnology.
The Advanced Microscopy Facility (AMF) is a full featured electron microscopy laboratory, with scanning EM, FIB, and other sample preparation instruments. In Spring 2011 AMF will become home to the highest resolution microscope in the world, a scanning transmission electron holography microscope (STEHM).
In via Renishaw Raman microscope with three excitation lines, 514.5, 632.8 and 785 nm. The system is equipped with streamline technology that allows fast Raman mapping.